The Ultra-Precision Surface Processing (UPOB) Competence Center brings together industry, universities, and research institutes to advance technologies for the production and metrological characterization of ultra-precise functional surfaces.
Its focus lies on ultra-precision machining, polishing and error correction methods, optical coatings, and advanced lithography and monitoring technologies, particularly for applications in optics and precision engineering. Key areas include the development of ultra-smooth optical components for photolithography as well as for extended wavelength ranges such as infrared, UV, and X-ray optics.
UPOB combines complementary expertise in mechanical, chemical, ion beam, plasma, and optical processing, surface characterization, high-precision structuring, and nanopositioning systems, creating strong synergies and promising opportunities for industrial and technological innovation.